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    Chemical Composition of Silicon Nitride Thin Films Prepared by LPCVD

    New search for: Ge, Q.-m.
    New search for: Liu, X.-j.
    New search for: Huang, Z.-y.
    New search for: Huang, L.-p.

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    Chemical Composition of Silicon Nitride Thin Films Prepared by LPCVD

    New search for: Ge, Q.-m.
    New search for: Liu, X.-j.
    New search for: Huang, Z.-y.
    New search for: Huang, L.-p.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Chemical Composition of Silicon Nitride Thin Films Prepared by LPCVD

    New search for: Ge, Q.-m.
    New search for: Liu, X.-j.
    New search for: Huang, Z.-y.
    New search for: Huang, L.-p.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Chemical Composition of Silicon Nitride Thin Films Prepared by LPCVD

    Contributors:

    Ge, Q.-m. (author) / Liu, X.-j. (author) / Huang, Z.-y. (author) / Huang, L.-p. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -HANGZHOU- ; 24 ; 192-195

    Publication date:

    2006-01-01

    Size:

    4 pages

    ISSN:

    1004-793X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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