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    Effect of hyperthermal annealing on LPCVD silicon nitride

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    New search for: Xu, Dehui
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    Effect of hyperthermal annealing on LPCVD silicon nitride

    New search for: Jiang, Wanli
    New search for: Xu, Dehui
    New search for: Yao, Shaokang
    New search for: Xiong, Bin
    New search for: Wang, Yuelin

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of hyperthermal annealing on LPCVD silicon nitride

    New search for: Jiang, Wanli
    New search for: Xu, Dehui
    New search for: Yao, Shaokang
    New search for: Xiong, Bin
    New search for: Wang, Yuelin

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Effect of hyperthermal annealing on LPCVD silicon nitride

    Contributors:

    Jiang, Wanli (author) / Xu, Dehui (author) / Yao, Shaokang (author) / Xiong, Bin (author) / Wang, Yuelin (author)

    Published in:

    Materials science in semiconductor processing ; 43 ; 222-229

    Publication date:

    2016-01-01

    Size:

    8 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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