Chemical vapour deposition of silicon nitride in a microwave plasma assisted reactor

Monteiro, O. R. / Wang, Z. / Brown, I. G. | British Library Online Contents | 1996

Diagnostic studies of discharges used for plasma assisted physical vapour deposition

Davison, A. / Avelar-Batista, J. C. / Wilson, A. D. et al. | British Library Online Contents | 2002

Plasma-assisted chemical vapour deposition of tin/oxide coatings

Inal, O. T. / Bengisu, M. / Guardian, J. | British Library Online Contents | 1993

Crystalline carbon nitride films prepared by microwave plasma chemical vapour deposition

Jiang, J. / Cheng, W. / Zhang, Y. et al. | British Library Online Contents | 2006

Deposition rates of titanium nitride plates prepared by chemical vapour deposition of TiCl~4 + NH~3 system

Jiang, C.-C. / Goto, T. / Hirai, T. | British Library Online Contents | 1993