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AFM studies of hydrogen implanted silicon

Piatkowska, A. / Gawlik, G. / Jagielski, J.

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AFM studies of hydrogen implanted silicon

Piatkowska, A. / Gawlik, G. / Jagielski, J.

AFM studies of hydrogen implanted silicon

Piatkowska, A. / Gawlik, G. / Jagielski, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

AFM studies of hydrogen implanted silicon

Contributors:

Piatkowska, A. (author) / Gawlik, G. (author) / Jagielski, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 141 ; 333-338

Publication date:

1999-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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