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X-ray reflectivity study of hydrogen implanted silicon

Dubcek, P. / Pivac, B. / Bernstorff, S. / Corni, F. / Tonini, R. / Ottaviani, G.

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X-ray reflectivity study of hydrogen implanted silicon

Dubcek, P. / Pivac, B. / Bernstorff, S. / Corni, F. / Tonini, R. / Ottaviani, G.

X-ray reflectivity study of hydrogen implanted silicon

Dubcek, P. / Pivac, B. / Bernstorff, S. / Corni, F. / Tonini, R. / Ottaviani, G.

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Document information

Title:

X-ray reflectivity study of hydrogen implanted silicon

Contributors:

Dubcek, P. (author) / Pivac, B. (author) / Bernstorff, S. (author) / Corni, F. (author) / Tonini, R. (author) / Ottaviani, G. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 283-286

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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