Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Surface dopant concentration measurement using the Surface Charge Profiler (SCP) method: characterization of hydrogen and metallic contamination in silicon

    New search for: Danel, A.
    New search for: Tardif, F.
    New search for: Kamarinos, G.
    New search for: Weber, J.
    New search for: Mesli, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Surface dopant concentration measurement using the Surface Charge Profiler (SCP) method: characterization of hydrogen and metallic contamination in silicon

    New search for: Danel, A.
    New search for: Tardif, F.
    New search for: Kamarinos, G.
    New search for: Weber, J.
    New search for: Mesli, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Surface dopant concentration measurement using the Surface Charge Profiler (SCP) method: characterization of hydrogen and metallic contamination in silicon

    New search for: Danel, A.
    New search for: Tardif, F.
    New search for: Kamarinos, G.
    New search for: Weber, J.
    New search for: Mesli, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Surface dopant concentration measurement using the Surface Charge Profiler (SCP) method: characterization of hydrogen and metallic contamination in silicon

    Contributors:

    Danel, A. (author) / Tardif, F. (author) / Kamarinos, G. (author) / Weber, J. / Mesli, A.

    Published in:

    Symposium A Detects in Snmon Hy[?] ; 64-70

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 58

    Publication date:

    1999-01-01

    Size:

    7 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Road surface profiler, road surface profiler performance measuring instrument, and method for assessing performance of same road surface profiler by using same measuring instrument

    SOHN DUECK SU / LEE JAE HOON | European Patent Office | 2022

    Free access

    ROAD SURFACE PROFILER, ROAD SURFACE PROFILER PERFORMANCE MEASURING INSTRUMENT, AND METHOD FOR ASSESSING PERFORMANCE OF SAME ROAD SURFACE PROFILER BY USING SAME MEASURING INSTRUMENT

    SOHN DUECK SU / LEE JAE HOON | European Patent Office | 2018

    Free access

    ROAD SURFACE PROFILER, ROAD SURFACE PROFILER PERFORMANCE MEASURING INSTRUMENT, AND METHOD FOR ASSESSING PERFORMANCE OF SAME ROAD SURFACE PROFILER BY USING SAME MEASURING INSTRUMENT

    SOHN DUECK SU / LEE JAE HOON | European Patent Office | 2019

    Free access

    Young's modulus measurement of nickel silicide film on crystal silicon by a surface profiler

    Qin, M. / Poon, V. M. C. | British Library Online Contents | 2000

    Comparison of surface roughness measurements by stylus profiler, AFM and non-contact optical profiler

    Poon, C. Y. / Bhushan, B. | British Library Online Contents | 1995

    Back to top