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    Chemical etching of thin SiO~xC~yH~z films by post-deposition exposure to oxygen plasma

    New search for: Vallee, C.
    New search for: Granier, A.
    New search for: Aumaille, K.
    New search for: Cardinaud, C.
    New search for: Goullet, A.
    New search for: Coulon, N.
    New search for: Turban, G.
    New search for: Boyd, I. W.
    New search for: Perriere, J.
    New search for: Stuke, M.

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    Chemical etching of thin SiO~xC~yH~z films by post-deposition exposure to oxygen plasma

    New search for: Vallee, C.
    New search for: Granier, A.
    New search for: Aumaille, K.
    New search for: Cardinaud, C.
    New search for: Goullet, A.
    New search for: Coulon, N.
    New search for: Turban, G.
    New search for: Boyd, I. W.
    New search for: Perriere, J.
    New search for: Stuke, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Chemical etching of thin SiO~xC~yH~z films by post-deposition exposure to oxygen plasma

    New search for: Vallee, C.
    New search for: Granier, A.
    New search for: Aumaille, K.
    New search for: Cardinaud, C.
    New search for: Goullet, A.
    New search for: Coulon, N.
    New search for: Turban, G.
    New search for: Boyd, I. W.
    New search for: Perriere, J.
    New search for: Stuke, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    Chemical etching of thin SiO~xC~yH~z films by post-deposition exposure to oxygen plasma

    Contributors:

    Vallee, C. (author) / Granier, A. (author) / Aumaille, K. (author) / Cardinaud, C. (author) / Goullet, A. (author) / Coulon, N. (author) / Turban, G. (author) / Boyd, I. W. / Perriere, J. / Stuke, M.

    Published in:

    Proceedings of Symposium G on Surface Processing: Laser, Lamp, Plasma of the 1998 E-MRS Spring Conference - Strasbourg, France, June 16-1998 ; 57-61

    APPLIED SURFACE SCIENCE ; 138/139

    Publication date:

    1999-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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