Etching of CVD diamond films using oxygen ions in ECR plasma

Ma, Z. / Wu, J. / Shen, W. et al. | British Library Online Contents | 2014

Chemical etching of thin SiO~xC~yH~z films by post-deposition exposure to oxygen plasma

Vallee, C. / Granier, A. / Aumaille, K. et al. | British Library Online Contents | 1999

Pulsed Laser Deposition of TiO~2 Thin Films In Oxygen Atmosphere

Singh, A. / Thareja, R. K. / Laser Science & Technology Centre | British Library Conference Proceedings | 2000

Effects of hydrogen etching process on the structural and optical properties of nano-crystalline diamond films

Wang, L. / Huang, J. / Zeng, Q. et al. | British Library Online Contents | 2012

Etching of polycrystalline diamond films by electron beam assisted plasma

Kobashi, K. / Miyauchi, S. / Miyata, K. et al. | British Library Online Contents | 1996