Atomic layer epitaxy of AlP and (AlP)"n(GaP)"n superlattice using ethyldimethylamine alane as a new aluminum source: Fid-Bau Portal

Atomic layer epitaxy of AlP and (AlP)"n(GaP)"n superlattice using ethyldimethylamine alane as a new aluminum source

Hirose, S. / Yamaura, M. / Munekata, H.

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Atomic layer epitaxy of AlP and (AlP)"n(GaP)"n superlattice using ethyldimethylamine alane as a new aluminum source

Hirose, S. / Yamaura, M. / Munekata, H.

Atomic layer epitaxy of AlP and (AlP)"n(GaP)"n superlattice using ethyldimethylamine alane as a new aluminum source

Hirose, S. / Yamaura, M. / Munekata, H.

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Check availability in my library

Order at Subito €

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Document information

Title:

Atomic layer epitaxy of AlP and (AlP)"n(GaP)"n superlattice using ethyldimethylamine alane as a new aluminum source

Contributors:

Hirose, S. (author) / Yamaura, M. (author) / Munekata, H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 150 ; 89-94

Publication date:

1999-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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