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A platform for research: civil engineering, architecture and urbanism
Plasma-deposited amorphous silicon carbide films for micromachined fluidic channels
Plasma-deposited amorphous silicon carbide films for micromachined fluidic channels
Plasma-deposited amorphous silicon carbide films for micromachined fluidic channels
Wuu, D.-S. (author) / Horng, R.-H. (author) / Chan, C.-C. (author) / Lee, Y.-S. (author)
APPLIED SURFACE SCIENCE ; 144 ; 708-712
1999-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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