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Investigation of titanium nitride films deposited at room temperature by energetic cluster impact

Jingsheng, C. / Guoqing, Y. / Ying, S. / Haochang, P. / Dezhang, Z. / Zhihao, Z. / Hongjie, X. / Fengynan, Y.

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Investigation of titanium nitride films deposited at room temperature by energetic cluster impact

Jingsheng, C. / Guoqing, Y. / Ying, S. / Haochang, P. / Dezhang, Z. / Zhihao, Z. / Hongjie, X. / Fengynan, Y.

Investigation of titanium nitride films deposited at room temperature by energetic cluster impact

Jingsheng, C. / Guoqing, Y. / Ying, S. / Haochang, P. / Dezhang, Z. / Zhihao, Z. / Hongjie, X. / Fengynan, Y.

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Document information

Title:

Investigation of titanium nitride films deposited at room temperature by energetic cluster impact

Contributors:

Jingsheng, C. (author) / Guoqing, Y. (author) / Ying, S. (author) / Haochang, P. (author) / Dezhang, Z. (author) / Zhihao, Z. (author) / Hongjie, X. (author) / Fengynan, Y. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 60 ; 200 - 204

Publication date:

1999-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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Patscheider, J. / Diserens, M. / Levy, F. | British Library Online Contents | 1998

Nitrogen pulsing to modify the properties of titanium nitride thin films sputter deposited

Martin, N. / Lintymer, J. / Gavoille, J. et al. | British Library Online Contents | 2002

A Multi-Technique Study of Titanium Nitride Films Deposited via Reactive Sputter Deposition

Walker, C. G. H. / Morton, S. A. / Charnock, J. M. et al. | British Library Online Contents | 2000