A Multi-Technique Study of Titanium Nitride Films Deposited via Reactive Sputter Deposition: Fid-Bau Portal

A Multi-Technique Study of Titanium Nitride Films Deposited via Reactive Sputter Deposition

Walker, C. G. H. / Morton, S. A. / Charnock, J. M. / MacLean, E. J. / Brown, N. M. D.

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A Multi-Technique Study of Titanium Nitride Films Deposited via Reactive Sputter Deposition

Walker, C. G. H. / Morton, S. A. / Charnock, J. M. / MacLean, E. J. / Brown, N. M. D.

A Multi-Technique Study of Titanium Nitride Films Deposited via Reactive Sputter Deposition

Walker, C. G. H. / Morton, S. A. / Charnock, J. M. / MacLean, E. J. / Brown, N. M. D.

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Check availability in my library

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Document information

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Document information

Title:

A Multi-Technique Study of Titanium Nitride Films Deposited via Reactive Sputter Deposition

Contributors:

Walker, C. G. H. (author) / Morton, S. A. (author) / Charnock, J. M. (author) / MacLean, E. J. (author) / Brown, N. M. D. (author)

Published in:

MATERIALS SCIENCE FORUM ; 325/326 ; 131-140

Publication date:

2000-01-01

Size:

10 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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