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Characterization and production metrology of thin transistor gate oxide films
Characterization and production metrology of thin transistor gate oxide films
Characterization and production metrology of thin transistor gate oxide films
Diebold, A.C. (author) / Venables, D. (author) / Chabal, Y. (author) / Muller, D. (author) / Weldon, M. (author) / Garfunkel, E. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 2 ; 103-147
1999-01-01
45 pages
Article (Journal)
English
DDC:
621.38152
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