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Characterization and production metrology of gate dielectric films

Diebold, A. C. / Canterbury, J. / Chism, W. / Richter, C. / Nguyen, N. / Ehrstein, J. / Weintraub, C.

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Characterization and production metrology of gate dielectric films

Diebold, A. C. / Canterbury, J. / Chism, W. / Richter, C. / Nguyen, N. / Ehrstein, J. / Weintraub, C.

Characterization and production metrology of gate dielectric films

Diebold, A. C. / Canterbury, J. / Chism, W. / Richter, C. / Nguyen, N. / Ehrstein, J. / Weintraub, C.

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Check availability in my library

Order at Subito €

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Document information

Title:

Characterization and production metrology of gate dielectric films

Contributors:

Diebold, A. C. (author) / Canterbury, J. (author) / Chism, W. (author) / Richter, C. (author) / Nguyen, N. (author) / Ehrstein, J. (author) / Weintraub, C. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 3-8

Publication date:

2001-01-01

Size:

6 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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