Research on the effect of nitrogen implantation doses on the structure of separation by implantation of oxygen and nitrogen: Fid-Bau Portal

Research on the effect of nitrogen implantation doses on the structure of separation by implantation of oxygen and nitrogen

Zhang, E. X. / Yi, W. B. / Chen, J. / Zhang, Z. X. / Wang, X.

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Research on the effect of nitrogen implantation doses on the structure of separation by implantation of oxygen and nitrogen

Zhang, E. X. / Yi, W. B. / Chen, J. / Zhang, Z. X. / Wang, X.

Research on the effect of nitrogen implantation doses on the structure of separation by implantation of oxygen and nitrogen

Zhang, E. X. / Yi, W. B. / Chen, J. / Zhang, Z. X. / Wang, X.

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Order at Subito €

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Document information

Title:

Research on the effect of nitrogen implantation doses on the structure of separation by implantation of oxygen and nitrogen

Contributors:

Zhang, E. X. (author) / Yi, W. B. (author) / Chen, J. (author) / Zhang, Z. X. (author) / Wang, X. (author)

Published in:

SMART MATERIALS AND STRUCTURES ; 14 ; N42-N45

Publication date:

2005-01-01

Size:

N42-N45

ISSN:

0964-1726

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 530

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