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Large area silicon carbide devices fabricated on SiC wafers with reduced micropipe density

Dmitriev, V. / Rendakova, S. / Kuznetsov, N. / Savkina, N. / Andreev, A. / Rastegaeva, M. / Mynbaeva, M. / Morozov, A.

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Large area silicon carbide devices fabricated on SiC wafers with reduced micropipe density

Dmitriev, V. / Rendakova, S. / Kuznetsov, N. / Savkina, N. / Andreev, A. / Rastegaeva, M. / Mynbaeva, M. / Morozov, A.

Large area silicon carbide devices fabricated on SiC wafers with reduced micropipe density

Dmitriev, V. / Rendakova, S. / Kuznetsov, N. / Savkina, N. / Andreev, A. / Rastegaeva, M. / Mynbaeva, M. / Morozov, A.

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Title:

Large area silicon carbide devices fabricated on SiC wafers with reduced micropipe density

Contributors:

Dmitriev, V. (author) / Rendakova, S. (author) / Kuznetsov, N. (author) / Savkina, N. (author) / Andreev, A. (author) / Rastegaeva, M. (author) / Mynbaeva, M. (author) / Morozov, A. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 61-62 ; 446 - 449

Publication date:

1999-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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