Silicon carbide CVD homoepitaxy on wafers with reduced micropipe density

Saddow, S.E. / Mazzola, M.S. / Rendakova, S.V. et al. | British Library Online Contents | 1999

100 mm 4HN-SiC Wafers with Zero Micropipe Density

Leonard, R.T. / Khlebnikov, Y. / Powell, A.R. et al. | British Library Online Contents | 2009

Power Schottky and p-n Diodes on SiC Epi-Wafers with Reduced Micropipe Density

Syrkin, A. / Dmitriev, V. / Yakimova, R. et al. | British Library Online Contents | 2002

Large area silicon carbide devices fabricated on SiC wafers with reduced micropipe density

Dmitriev, V. / Rendakova, S. / Kuznetsov, N. et al. | British Library Online Contents | 1999

4H-SiC CVD Epitaxial Layers with Improved Structural Quality Grown on SiC Wafers with Reduced Micropipe Density

Kalinina, E. V. / Zubrilov, A. / Solov'ev, V. et al. | British Library Online Contents | 2000