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100 mm 4HN-SiC Wafers with Zero Micropipe Density
100 mm 4HN-SiC Wafers with Zero Micropipe Density
100 mm 4HN-SiC Wafers with Zero Micropipe Density
Leonard, R.T. (author) / Khlebnikov, Y. (author) / Powell, A.R. (author) / Basceri, C. (author) / Brady, M.F. (author) / Khlebnikov, I. (author) / Jenny, J.R. (author) / Malta, D.P. (author) / Paisley, M.J. (author) / Tsvetkov, V.F. (author)
MATERIALS SCIENCE FORUM ; 600/603 ; 7-10
2009-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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