Thermal behaviour of Co/Si/W/Si multilayers under rapid thermal annealing: Fid-Bau Portal

Thermal behaviour of Co/Si/W/Si multilayers under rapid thermal annealing

Luby, S. / Jergel, M. / Anopchenko, A. / Aschentrup, A. / Hamelmann, F. / Majkova, E. / Kleineberg, U. / Heinzmann, U.

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Thermal behaviour of Co/Si/W/Si multilayers under rapid thermal annealing

Luby, S. / Jergel, M. / Anopchenko, A. / Aschentrup, A. / Hamelmann, F. / Majkova, E. / Kleineberg, U. / Heinzmann, U.

Thermal behaviour of Co/Si/W/Si multilayers under rapid thermal annealing

Luby, S. / Jergel, M. / Anopchenko, A. / Aschentrup, A. / Hamelmann, F. / Majkova, E. / Kleineberg, U. / Heinzmann, U.

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Check availability in my library

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Document information

Title:

Thermal behaviour of Co/Si/W/Si multilayers under rapid thermal annealing

Contributors:

Luby, S. (author) / Jergel, M. (author) / Anopchenko, A. (author) / Aschentrup, A. (author) / Hamelmann, F. (author) / Majkova, E. (author) / Kleineberg, U. (author) / Heinzmann, U. (author)

Published in:

APPLIED SURFACE SCIENCE ; 150 ; 178-184

Publication date:

1999-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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