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    Polycrystalline silicon film formation at low temperature using ultra-high-frequency plasma enhanced chemical vapor deposition

    New search for: Mebarki, B.
    New search for: Sumiya, S.
    New search for: Yoshida, R.
    New search for: Ito, M.
    New search for: Hori, M.
    New search for: Goto, T.
    New search for: Samukawa, S.
    New search for: Tsukada, T.

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    Polycrystalline silicon film formation at low temperature using ultra-high-frequency plasma enhanced chemical vapor deposition

    New search for: Mebarki, B.
    New search for: Sumiya, S.
    New search for: Yoshida, R.
    New search for: Ito, M.
    New search for: Hori, M.
    New search for: Goto, T.
    New search for: Samukawa, S.
    New search for: Tsukada, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Polycrystalline silicon film formation at low temperature using ultra-high-frequency plasma enhanced chemical vapor deposition

    New search for: Mebarki, B.
    New search for: Sumiya, S.
    New search for: Yoshida, R.
    New search for: Ito, M.
    New search for: Hori, M.
    New search for: Goto, T.
    New search for: Samukawa, S.
    New search for: Tsukada, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Polycrystalline silicon film formation at low temperature using ultra-high-frequency plasma enhanced chemical vapor deposition

    Contributors:

    Mebarki, B. (author) / Sumiya, S. (author) / Yoshida, R. (author) / Ito, M. (author) / Hori, M. (author) / Goto, T. (author) / Samukawa, S. (author) / Tsukada, T. (author)

    Published in:

    MATERIALS LETTERS ; 41 ; 16-19

    Publication date:

    1999-01-01

    Size:

    4 pages

    ISSN:

    0167-577X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1105 / 530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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