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    Aluminum titanium nitride films grown with multiple precursors

    New search for: Sun, Y.-M.Y.-M.
    New search for: Endle, J.P.
    New search for: Ekerdt, J.G.
    New search for: Russell, N.M.
    New search for: Healy, M.D.
    New search for: White, J.M.

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    Aluminum titanium nitride films grown with multiple precursors

    New search for: Sun, Y.-M.Y.-M.
    New search for: Endle, J.P.
    New search for: Ekerdt, J.G.
    New search for: Russell, N.M.
    New search for: Healy, M.D.
    New search for: White, J.M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Aluminum titanium nitride films grown with multiple precursors

    New search for: Sun, Y.-M.Y.-M.
    New search for: Endle, J.P.
    New search for: Ekerdt, J.G.
    New search for: Russell, N.M.
    New search for: Healy, M.D.
    New search for: White, J.M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Aluminum titanium nitride films grown with multiple precursors

    Contributors:

    Sun, Y.-M.Y.-M. (author) / Endle, J.P. (author) / Ekerdt, J.G. (author) / Russell, N.M. (author) / Healy, M.D. (author) / White, J.M. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 2 ; 253-261

    Publication date:

    1999-01-01

    Size:

    9 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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