Impurity-vacancy defects in implanted float-zone and Czochralski-Si: Fid-Bau Portal

Impurity-vacancy defects in implanted float-zone and Czochralski-Si

Xu, J. / Mills, A.P. / Suzuki, R. / Roth, E.G. / Holland, O.W.

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Impurity-vacancy defects in implanted float-zone and Czochralski-Si

Xu, J. / Mills, A.P. / Suzuki, R. / Roth, E.G. / Holland, O.W.

Impurity-vacancy defects in implanted float-zone and Czochralski-Si

Xu, J. / Mills, A.P. / Suzuki, R. / Roth, E.G. / Holland, O.W.

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Document information

Title:

Impurity-vacancy defects in implanted float-zone and Czochralski-Si

Contributors:

Xu, J. (author) / Mills, A.P. (author) / Suzuki, R. (author) / Roth, E.G. (author) / Holland, O.W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 149 ; 193-197

Publication date:

1999-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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