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Impurity engineering of Czochralski silicon

Yu, X. / Chen, J. / Ma, X. / Yang, D.

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Impurity engineering of Czochralski silicon

Yu, X. / Chen, J. / Ma, X. / Yang, D.

Impurity engineering of Czochralski silicon

Yu, X. / Chen, J. / Ma, X. / Yang, D.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Impurity engineering of Czochralski silicon

Contributors:

Yu, X. (author) / Chen, J. (author) / Ma, X. (author) / Yang, D. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING R REPORTS -LAUSANNE- ; 74 ; 1-33

Publication date:

2013-01-01

Size:

33 pages

ISSN:

0927-796X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 530

Avalos, V. / Dannefaer, S. | British Library Online Contents | 1997

Defect engineering of Czochralski single-crystal silicon

Sinno, T. / Dornberger, E. / von Ammon, W. et al. | British Library Online Contents | 2000

Baseline variations near the nitrogen impurity vibrational bands in the infrared spectra of Czochralski silicon

Shirai, H. / Kashima, K. | British Library Online Contents | 2002

Impurity-vacancy defects in implanted float-zone and Czochralski-Si

Xu, J. / Mills, A.P. / Suzuki, R. et al. | British Library Online Contents | 1999

Effect of oxygen concentration on diffusion length in Czochralski and magnetic Czochralski silicon

Binetti, S. / Acciarri, M. / Brianza, A. et al. | British Library Online Contents | 1995