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Annealing experiments on supercritical Si"1"-"xGe"x layers grown by RPCVD
Annealing experiments on supercritical Si"1"-"xGe"x layers grown by RPCVD
Annealing experiments on supercritical Si"1"-"xGe"x layers grown by RPCVD
Grimm, K. (author) / Vescan, L. (author) / Visser, C.C.G. (author) / Nanver, L.K. (author) / Luth, H. (author)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 69-70 ; 261 - 265
2000-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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