Fundamentals of Ge1−xSnx and SiyGe1−x-ySnx RPCVD epitaxy: Fid-Bau Portal

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Fundamentals of Ge1−xSnx and SiyGe1−x-ySnx RPCVD epitaxy

Margetis, Joe / Mosleh, Aboozar / Ghetmiri, Seyed Amir / Al-Kabi, Sattar / Dou, Wei / Du, Wei / Bhargava, Nupur / Yu, Shui-Qing / Profijt, Harald / Kohen, David / ... [more]

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Fundamentals of Ge1−xSnx and SiyGe1−x-ySnx RPCVD epitaxy

Margetis, Joe / Mosleh, Aboozar / Ghetmiri, Seyed Amir / Al-Kabi, Sattar / Dou, Wei / Du, Wei / Bhargava, Nupur / Yu, Shui-Qing / Profijt, Harald / Kohen, David / ... [more]

Fundamentals of Ge1−xSnx and SiyGe1−x-ySnx RPCVD epitaxy

Margetis, Joe / Mosleh, Aboozar / Ghetmiri, Seyed Amir / Al-Kabi, Sattar / Dou, Wei / Du, Wei / Bhargava, Nupur / Yu, Shui-Qing / Profijt, Harald / Kohen, David / ... [more]

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Order at Subito €

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Title:

Fundamentals of Ge1−xSnx and SiyGe1−x-ySnx RPCVD epitaxy

Contributors:

Margetis, Joe (author) / Mosleh, Aboozar (author) / Ghetmiri, Seyed Amir (author) / Al-Kabi, Sattar (author) / Dou, Wei (author) / Du, Wei (author) / Bhargava, Nupur (author) / Yu, Shui-Qing (author) / Profijt, Harald (author) / Kohen, David (author)

Published in:

Materials science in semiconductor processing ; 70 ; 38-43

Publication date:

2017-01-01

Size:

6 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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