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XRR and GISAXS study of silicon oxynitride films

Bernstorff, S. / Dubcek, P. / Pivac, B. / Kovacevic, I. / Sassella, A. / Borghesi, A.

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XRR and GISAXS study of silicon oxynitride films

Bernstorff, S. / Dubcek, P. / Pivac, B. / Kovacevic, I. / Sassella, A. / Borghesi, A.

XRR and GISAXS study of silicon oxynitride films

Bernstorff, S. / Dubcek, P. / Pivac, B. / Kovacevic, I. / Sassella, A. / Borghesi, A.

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Document information

Title:

XRR and GISAXS study of silicon oxynitride films

Contributors:

Bernstorff, S. (author) / Dubcek, P. (author) / Pivac, B. (author) / Kovacevic, I. (author) / Sassella, A. (author) / Borghesi, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 33-37

Publication date:

2006-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Dubcek, P. / Milat, O. / Pivac, B. et al. | British Library Online Contents | 2000

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Silicon Oxynitride ECR-PECVD Films for Integrated Optics

Pernas, P. L. / Ruiz, E. / Garrido, J. et al. | British Library Online Contents | 2005

Mechanical properties of sputtered silicon oxynitride films by nanoindentation

Liu, Y. / Lin, I. K. / Zhang, X. | British Library Online Contents | 2008