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    XRR and GISAXS study of silicon oxynitride films

    New search for: Bernstorff, S.
    New search for: Dubcek, P.
    New search for: Pivac, B.
    New search for: Kovacevic, I.
    New search for: Sassella, A.
    New search for: Borghesi, A.

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    XRR and GISAXS study of silicon oxynitride films

    New search for: Bernstorff, S.
    New search for: Dubcek, P.
    New search for: Pivac, B.
    New search for: Kovacevic, I.
    New search for: Sassella, A.
    New search for: Borghesi, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    XRR and GISAXS study of silicon oxynitride films

    New search for: Bernstorff, S.
    New search for: Dubcek, P.
    New search for: Pivac, B.
    New search for: Kovacevic, I.
    New search for: Sassella, A.
    New search for: Borghesi, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    XRR and GISAXS study of silicon oxynitride films

    Contributors:

    Bernstorff, S. (author) / Dubcek, P. (author) / Pivac, B. (author) / Kovacevic, I. (author) / Sassella, A. (author) / Borghesi, A. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 253 ; 33-37

    Publication date:

    2006-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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