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XRR and GISAXS study of silicon oxynitride films
XRR and GISAXS study of silicon oxynitride films
XRR and GISAXS study of silicon oxynitride films
Bernstorff, S. (author) / Dubcek, P. (author) / Pivac, B. (author) / Kovacevic, I. (author) / Sassella, A. (author) / Borghesi, A. (author)
APPLIED SURFACE SCIENCE ; 253 ; 33-37
2006-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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