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Thermal stability of defect complexes due to high dose MeV implantation in silicon
Thermal stability of defect complexes due to high dose MeV implantation in silicon
Thermal stability of defect complexes due to high dose MeV implantation in silicon
Giri, P.K. (author) / Mohapatra, Y.N. (author)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 71 ; 327 - 332
2000-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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