Copper in silicon: quantitative analysis of internal and proximity gettering: Fid-Bau Portal

Copper in silicon: quantitative analysis of internal and proximity gettering

McHugo, S. A. / Heiser, T. / Hieslmair, H. / Flink, C. / Weber, E. R. / Myers, S. M. / Petersen, G. A.

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Copper in silicon: quantitative analysis of internal and proximity gettering

McHugo, S. A. / Heiser, T. / Hieslmair, H. / Flink, C. / Weber, E. R. / Myers, S. M. / Petersen, G. A.

Copper in silicon: quantitative analysis of internal and proximity gettering

McHugo, S. A. / Heiser, T. / Hieslmair, H. / Flink, C. / Weber, E. R. / Myers, S. M. / Petersen, G. A.

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Check availability in my library

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Document information

Title:

Copper in silicon: quantitative analysis of internal and proximity gettering

Contributors:

McHugo, S. A. (author) / Heiser, T. (author) / Hieslmair, H. (author) / Flink, C. (author) / Weber, E. R. (author) / Myers, S. M. (author) / Petersen, G. A. (author)

Published in:

MATERIALS SCIENCE FORUM ; 258/263 ; 461-466

Publication date:

1997-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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