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    Quantitative TOF-SIMS analysis of metal contamination on silicon wafers

    New search for: Zanderigo, F.
    New search for: Ferrari, S.
    New search for: Queirolo, G.
    New search for: Pello, C.
    New search for: Borgini, M.

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    Quantitative TOF-SIMS analysis of metal contamination on silicon wafers

    New search for: Zanderigo, F.
    New search for: Ferrari, S.
    New search for: Queirolo, G.
    New search for: Pello, C.
    New search for: Borgini, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Quantitative TOF-SIMS analysis of metal contamination on silicon wafers

    New search for: Zanderigo, F.
    New search for: Ferrari, S.
    New search for: Queirolo, G.
    New search for: Pello, C.
    New search for: Borgini, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Quantitative TOF-SIMS analysis of metal contamination on silicon wafers

    Contributors:

    Zanderigo, F. (author) / Ferrari, S. (author) / Queirolo, G. (author) / Pello, C. (author) / Borgini, M. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 73 ; 173 - 177

    Publication date:

    2000-01-01

    Size:

    5 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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