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Analysis of amine contamination on silicon oxide surfaces using ToF-SIMS

Lu, D. / Mo, Z. Q. / Xing, Z. X. / Gui, D.

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Analysis of amine contamination on silicon oxide surfaces using ToF-SIMS

Lu, D. / Mo, Z. Q. / Xing, Z. X. / Gui, D.

Analysis of amine contamination on silicon oxide surfaces using ToF-SIMS

Lu, D. / Mo, Z. Q. / Xing, Z. X. / Gui, D.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Analysis of amine contamination on silicon oxide surfaces using ToF-SIMS

Contributors:

Lu, D. (author) / Mo, Z. Q. (author) / Xing, Z. X. (author) / Gui, D. (author)

Published in:

APPLIED SURFACE SCIENCE ; 233 ; 352-359

Publication date:

2004-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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