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    Thin oxide reliability and gettering efficiency in advanced silicon substrates

    New search for: Polignano, M. L.
    New search for: Ghidini, G.
    New search for: Cazzaniga, F.
    New search for: Ceresara, L.
    New search for: Illuzzi, F.
    New search for: Padovani, B.
    New search for: Pellizzer, F.

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    Thin oxide reliability and gettering efficiency in advanced silicon substrates

    New search for: Polignano, M. L.
    New search for: Ghidini, G.
    New search for: Cazzaniga, F.
    New search for: Ceresara, L.
    New search for: Illuzzi, F.
    New search for: Padovani, B.
    New search for: Pellizzer, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Thin oxide reliability and gettering efficiency in advanced silicon substrates

    New search for: Polignano, M. L.
    New search for: Ghidini, G.
    New search for: Cazzaniga, F.
    New search for: Ceresara, L.
    New search for: Illuzzi, F.
    New search for: Padovani, B.
    New search for: Pellizzer, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Thin oxide reliability and gettering efficiency in advanced silicon substrates

    Contributors:

    Polignano, M. L. (author) / Ghidini, G. (author) / Cazzaniga, F. (author) / Ceresara, L. (author) / Illuzzi, F. (author) / Padovani, B. (author) / Pellizzer, F. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 73 ; 99 - 105

    Publication date:

    2000-01-01

    Size:

    7 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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