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    Advanced Gettering Techniques in ULSI Technology

    New search for: Istratov, A. A.
    New search for: Hieslmair, H.
    New search for: Weber, E. R.

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    Advanced Gettering Techniques in ULSI Technology

    New search for: Istratov, A. A.
    New search for: Hieslmair, H.
    New search for: Weber, E. R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Advanced Gettering Techniques in ULSI Technology

    New search for: Istratov, A. A.
    New search for: Hieslmair, H.
    New search for: Weber, E. R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Advanced Gettering Techniques in ULSI Technology

    Contributors:

    Istratov, A. A. (author) / Hieslmair, H. (author) / Weber, E. R. (author)

    Published in:

    MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 25 ; 33-38

    Publication date:

    2000-01-01

    Size:

    6 pages

    ISSN:

    0883-7694

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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