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    Numerical simulation for silicon crystal growth of up to 400 mm diameter in Czochralski furnaces

    New search for: Takano, K.
    New search for: Shiraishi, Y.
    New search for: Iida, T.
    New search for: Takase, N.
    New search for: Matsubara, J.
    New search for: Machida, N.
    New search for: Kuramoto, M.
    New search for: Yamagishi, H.

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    Numerical simulation for silicon crystal growth of up to 400 mm diameter in Czochralski furnaces

    New search for: Takano, K.
    New search for: Shiraishi, Y.
    New search for: Iida, T.
    New search for: Takase, N.
    New search for: Matsubara, J.
    New search for: Machida, N.
    New search for: Kuramoto, M.
    New search for: Yamagishi, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Numerical simulation for silicon crystal growth of up to 400 mm diameter in Czochralski furnaces

    New search for: Takano, K.
    New search for: Shiraishi, Y.
    New search for: Iida, T.
    New search for: Takase, N.
    New search for: Matsubara, J.
    New search for: Machida, N.
    New search for: Kuramoto, M.
    New search for: Yamagishi, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Numerical simulation for silicon crystal growth of up to 400 mm diameter in Czochralski furnaces

    Contributors:

    Takano, K. (author) / Shiraishi, Y. (author) / Iida, T. (author) / Takase, N. (author) / Matsubara, J. (author) / Machida, N. (author) / Kuramoto, M. (author) / Yamagishi, H. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 73 ; 30 - 35

    Publication date:

    2000-01-01

    Size:

    6 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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