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    Experiment and numerical simulation of melt convection and oxygen distribution in 400-mm Czochralski silicon crystal growth

    New search for: Teng, R.
    New search for: Li, Y.
    New search for: Cui, B.
    New search for: Chang, Q.
    New search for: Xiao, Q. H.
    New search for: Zhang, G. H.

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    Experiment and numerical simulation of melt convection and oxygen distribution in 400-mm Czochralski silicon crystal growth

    New search for: Teng, R.
    New search for: Li, Y.
    New search for: Cui, B.
    New search for: Chang, Q.
    New search for: Xiao, Q. H.
    New search for: Zhang, G. H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Experiment and numerical simulation of melt convection and oxygen distribution in 400-mm Czochralski silicon crystal growth

    New search for: Teng, R.
    New search for: Li, Y.
    New search for: Cui, B.
    New search for: Chang, Q.
    New search for: Xiao, Q. H.
    New search for: Zhang, G. H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Experiment and numerical simulation of melt convection and oxygen distribution in 400-mm Czochralski silicon crystal growth

    Contributors:

    Teng, R. (author) / Li, Y. (author) / Cui, B. (author) / Chang, Q. (author) / Xiao, Q. H. (author) / Zhang, G. H. (author)

    Published in:

    RARE METALS -BEIJING- ENGLISH EDITION ; 36 ; 134-141

    Publication date:

    2017-01-01

    Size:

    8 pages

    ISSN:

    1001-0521

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  669

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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