Electrical Characteristics and Surface Morphology for Arsenic Ion-Implanted 4H-SiC at High Temperature: Fid-Bau Portal

Electrical Characteristics and Surface Morphology for Arsenic Ion-Implanted 4H-SiC at High Temperature

Senzaki, J. / Fukuda, K. / Imai, S. / Tanaka, Y. / Kobayashi, N. / Tanoue, H. / Okushi, H. / Arai, K.

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Electrical Characteristics and Surface Morphology for Arsenic Ion-Implanted 4H-SiC at High Temperature

Senzaki, J. / Fukuda, K. / Imai, S. / Tanaka, Y. / Kobayashi, N. / Tanoue, H. / Okushi, H. / Arai, K.

Electrical Characteristics and Surface Morphology for Arsenic Ion-Implanted 4H-SiC at High Temperature

Senzaki, J. / Fukuda, K. / Imai, S. / Tanaka, Y. / Kobayashi, N. / Tanoue, H. / Okushi, H. / Arai, K.

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Document information

Title:

Electrical Characteristics and Surface Morphology for Arsenic Ion-Implanted 4H-SiC at High Temperature

Contributors:

Senzaki, J. (author) / Fukuda, K. (author) / Imai, S. (author) / Tanaka, Y. (author) / Kobayashi, N. (author) / Tanoue, H. (author) / Okushi, H. (author) / Arai, K. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 865-868

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Senzaki, J. / Fukuda, K. / Imai, S. et al. | British Library Online Contents | 2000

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