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    Coimplantation Effects of (C and Si)/Ga in 6H-SiC

    New search for: Tanaka, Y.
    New search for: Kobayashi, N.
    New search for: Hasegawa, M.
    New search for: Ogura, M.
    New search for: Ishida, Y.
    New search for: Yoshida, S.
    New search for: Okumura, H.
    New search for: Tanoue, H.

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    Coimplantation Effects of (C and Si)/Ga in 6H-SiC

    New search for: Tanaka, Y.
    New search for: Kobayashi, N.
    New search for: Hasegawa, M.
    New search for: Ogura, M.
    New search for: Ishida, Y.
    New search for: Yoshida, S.
    New search for: Okumura, H.
    New search for: Tanoue, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Coimplantation Effects of (C and Si)/Ga in 6H-SiC

    New search for: Tanaka, Y.
    New search for: Kobayashi, N.
    New search for: Hasegawa, M.
    New search for: Ogura, M.
    New search for: Ishida, Y.
    New search for: Yoshida, S.
    New search for: Okumura, H.
    New search for: Tanoue, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Coimplantation Effects of (C and Si)/Ga in 6H-SiC

    Contributors:

    Tanaka, Y. (author) / Kobayashi, N. (author) / Hasegawa, M. (author) / Ogura, M. (author) / Ishida, Y. (author) / Yoshida, S. (author) / Okumura, H. (author) / Tanoue, H. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 338/342 ; 917-920

    Publication date:

    2000-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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