Deep reactive ion etching of PMMA

Zhang, C. / Yang, C. / Ding, D. | British Library Online Contents | 2004

Reactive Ion Etching Process of 4H-SiC Using the CHF~3/O~2 Mixtures and a Post-O~2 Plasma-Etching Process

Kang, S. C. / Shin, M. W. | British Library Online Contents | 2002

Basic Phenomena in Reactive Etching of Materials

Auciello, Orlando | Springer Verlag | 1990

Reactive Ion Etching of Silicon Containing Resists

Hartney, M. A. / Hess, D. W. / Soane, D. S. | Springer Verlag | 1990

Photoelectrochemical etching to fabricate single-crystal SiC MEMS for harsh environments

Zhao, F. / Islam, M. M. / Huang, C. F. | British Library Online Contents | 2011