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Comparative surface studies on wet and dry sacrificial thermal oxidation on silicon carbide

Koh, A. / Kestle, A. / Wright, C. / Wilks, S. P. / Mawby, P. A. / Bowen, W. R.

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Comparative surface studies on wet and dry sacrificial thermal oxidation on silicon carbide

Koh, A. / Kestle, A. / Wright, C. / Wilks, S. P. / Mawby, P. A. / Bowen, W. R.

Comparative surface studies on wet and dry sacrificial thermal oxidation on silicon carbide

Koh, A. / Kestle, A. / Wright, C. / Wilks, S. P. / Mawby, P. A. / Bowen, W. R.

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Document information

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Document information

Title:

Comparative surface studies on wet and dry sacrificial thermal oxidation on silicon carbide

Contributors:

Koh, A. (author) / Kestle, A. (author) / Wright, C. (author) / Wilks, S. P. (author) / Mawby, P. A. (author) / Bowen, W. R. (author)

Published in:

APPLIED SURFACE SCIENCE ; 174 ; 210-216

Publication date:

2001-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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