Ellipsometric Study of Thermal Silicon Oxide and Sacrificial Silicon Oxide on 4H-SiC: Fid-Bau Portal

Ellipsometric Study of Thermal Silicon Oxide and Sacrificial Silicon Oxide on 4H-SiC

Chen, L. / Guy, O. J. / Pope, G. / Teng, K. S. / Maffeis, T. / Wilks, S. P. / Mawby, P. A. / Jenkins, T. / Brieva, A. / Hayton, D. J.

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Ellipsometric Study of Thermal Silicon Oxide and Sacrificial Silicon Oxide on 4H-SiC

Chen, L. / Guy, O. J. / Pope, G. / Teng, K. S. / Maffeis, T. / Wilks, S. P. / Mawby, P. A. / Jenkins, T. / Brieva, A. / Hayton, D. J.

Ellipsometric Study of Thermal Silicon Oxide and Sacrificial Silicon Oxide on 4H-SiC

Chen, L. / Guy, O. J. / Pope, G. / Teng, K. S. / Maffeis, T. / Wilks, S. P. / Mawby, P. A. / Jenkins, T. / Brieva, A. / Hayton, D. J.

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Document information

Title:

Ellipsometric Study of Thermal Silicon Oxide and Sacrificial Silicon Oxide on 4H-SiC

Contributors:

Chen, L. (author) / Guy, O. J. (author) / Pope, G. (author) / Teng, K. S. (author) / Maffeis, T. (author) / Wilks, S. P. (author) / Mawby, P. A. (author) / Jenkins, T. (author) / Brieva, A. (author) / Hayton, D. J. (author)

Published in:

MATERIALS SCIENCE FORUM ; 457/460 ; 1337-1340

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Guy, O. J. / Chen, L. / Pope, G. et al. | British Library Online Contents | 2006

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Jayatissa, A. H. / Suzuki, M. / Nakanishi, Y. et al. | British Library Online Contents | 1996

Ellipsometric characterization of nanocrystals in porous silicon

Petrik, P. / Fried, M. / Vazsonyi, E. et al. | British Library Online Contents | 2006

Controlled Thermal Oxidation of Sacrificial Silicon on 4H-SiC Epilayer

Koh, A. / Kestle, A. / Dunstan, P. R. et al. | British Library Online Contents | 2000

Ellipsometric characterization of oxidized porous silicon layer structures

Lohner, T. / Fried, M. / Petrik, P. et al. | British Library Online Contents | 2000