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X-Ray Characterization of 3 Inch Diameter 4H and 6H-SiC Experimental Wafers
X-Ray Characterization of 3 Inch Diameter 4H and 6H-SiC Experimental Wafers
X-Ray Characterization of 3 Inch Diameter 4H and 6H-SiC Experimental Wafers
Kuhr, T. A. (author) / Vetter, W. M. (author) / Dudley, M. (author) / Skowronski, M. (author)
MATERIALS SCIENCE FORUM ; 338/342 ; 473-476
2000-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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