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Characterization of 2 Inch SiC Wafers Made by the Sublimation Method
Characterization of 2 Inch SiC Wafers Made by the Sublimation Method
Characterization of 2 Inch SiC Wafers Made by the Sublimation Method
Sasaki, M. (author) / Shiomi, H. (author) / Nishino, S. (author)
MATERIALS SCIENCE FORUM ; 353/356 ; 267-270
2001-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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