Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Electrochemically Deposited Copper for ULSI Technology

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Electrochemically Deposited Copper for ULSI Technology

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Electrochemically Deposited Copper for ULSI Technology

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Electrochemically Deposited Copper for ULSI Technology

    Contributors:

    Shacham-Diamand, Y. (author) / Paunovic, M. / Electrochemical Society; Electrodeposition Division

    Conference:

    2nd Symposium; Fall meeting, Electrochemically deposited thin films ; 1994 ; Miami Beach; FL

    Published in:

    Electrochemically deposited thin films ; 293-303

    PROCEEDINGS- ELECTROCHEMICAL SOCIETY PV ; 94-31

    Publication date:

    1995-01-01

    Size:

    11 pages

    ISBN:

    1566770904

    Type of media:

    Conference paper

    Type of material:

    Print

    Language:

    English

    Keywords:

    electrochemically deposited thin films , electrodeposition , thin films

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    X-Ray Diffraction Investigation of Electrochemically Deposited Copper

    Pantleon, K. / Jensen, J. D. / Somers, M. A. J. | British Library Online Contents | 2004

    Microstructure formation in electrochemically deposited Copper thin films

    Kremmer, K. / Yezerska, O. / Schreiber, G. et al. | British Library Online Contents | 2007

    Copper-Based Metallization in ULSI Structures

    Li, J. / Seidel, T. E. / Mayer, J. W. | British Library Online Contents | 1994

    Copper-Based Metallization for ULSI Applications

    Li, J. / Blewer, R. S. / Mayer, J. W. | British Library Online Contents | 1993

    ECR Plasma Etching Technology for ULSI

    Samukawa, S. | British Library Online Contents | 1993

    Back to top