Low-Temperature Growth and Photoluminescence of SiCN Nanoparticle Film by Consecutive RF Magnetron Sputtering: Fid-Bau Portal

Low-Temperature Growth and Photoluminescence of SiCN Nanoparticle Film by Consecutive RF Magnetron Sputtering

Xu, M. / Ng, V. M. / Huang, S. Y. / Xu, S. Y.

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Low-Temperature Growth and Photoluminescence of SiCN Nanoparticle Film by Consecutive RF Magnetron Sputtering

Xu, M. / Ng, V. M. / Huang, S. Y. / Xu, S. Y.

Low-Temperature Growth and Photoluminescence of SiCN Nanoparticle Film by Consecutive RF Magnetron Sputtering

Xu, M. / Ng, V. M. / Huang, S. Y. / Xu, S. Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

Title:

Low-Temperature Growth and Photoluminescence of SiCN Nanoparticle Film by Consecutive RF Magnetron Sputtering

Contributors:

Xu, M. (author) / Ng, V. M. (author) / Huang, S. Y. (author) / Xu, S. Y. (author)

Published in:

SURFACE REVIEW AND LETTERS ; 11 ; 515-520

Publication date:

2004-01-01

Size:

6 pages

ISSN:

0218-625X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 530.417

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