XPS analysis of Pb(Zr0.52Ti0.48)O3 thin film after dry-etching by CHF3 plasma: Fid-Bau Portal

XPS analysis of Pb(Zr0.52Ti0.48)O3 thin film after dry-etching by CHF3 plasma

Lin, Y. y. / Liu, Q. / Tang, T. a. / Yao, X.

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XPS analysis of Pb(Zr0.52Ti0.48)O3 thin film after dry-etching by CHF3 plasma

Lin, Y. y. / Liu, Q. / Tang, T. a. / Yao, X.

XPS analysis of Pb(Zr0.52Ti0.48)O3 thin film after dry-etching by CHF3 plasma

Lin, Y. y. / Liu, Q. / Tang, T. a. / Yao, X.

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Check availability in my library

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Document information

Title:

XPS analysis of Pb(Zr0.52Ti0.48)O3 thin film after dry-etching by CHF3 plasma

Contributors:

Lin, Y. y. (author) / Liu, Q. (author) / Tang, T. a. (author) / Yao, X. (author)

Published in:

APPLIED SURFACE SCIENCE ; 165 ; 34-37

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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