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    ESR characterization of the top Si layer of ion implanted SIMOX

    New search for: Chowdhury, E. A.
    New search for: Seki, T.
    New search for: Izumi, T.
    New search for: Tanaka, H.
    New search for: Hara, T.

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    ESR characterization of the top Si layer of ion implanted SIMOX

    New search for: Chowdhury, E. A.
    New search for: Seki, T.
    New search for: Izumi, T.
    New search for: Tanaka, H.
    New search for: Hara, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    ESR characterization of the top Si layer of ion implanted SIMOX

    New search for: Chowdhury, E. A.
    New search for: Seki, T.
    New search for: Izumi, T.
    New search for: Tanaka, H.
    New search for: Hara, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    ESR characterization of the top Si layer of ion implanted SIMOX

    Contributors:

    Chowdhury, E. A. (author) / Seki, T. (author) / Izumi, T. (author) / Tanaka, H. (author) / Hara, T. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 159-160 ; 231-236

    Publication date:

    2000-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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