Low-temperature solid-phase-crystallization in Si1-xGex/SiO2: Fid-Bau Portal

Low-temperature solid-phase-crystallization in Si1-xGex/SiO2

Park, S. K. / Yamaguchi, S. / Sugii, N. / Nakagawa, K. / Miyao, M.

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Low-temperature solid-phase-crystallization in Si1-xGex/SiO2

Park, S. K. / Yamaguchi, S. / Sugii, N. / Nakagawa, K. / Miyao, M.

Low-temperature solid-phase-crystallization in Si1-xGex/SiO2

Park, S. K. / Yamaguchi, S. / Sugii, N. / Nakagawa, K. / Miyao, M.

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Document information

Title:

Low-temperature solid-phase-crystallization in Si1-xGex/SiO2

Contributors:

Park, S. K. (author) / Yamaguchi, S. (author) / Sugii, N. (author) / Nakagawa, K. (author) / Miyao, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 159-160 ; 116-120

Publication date:

2000-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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