Low-temperature solid-phase crystallization of a-Si1-xGex on SiO2 by ion-beam stimulation: Fid-Bau Portal

Low-temperature solid-phase crystallization of a-Si1-xGex on SiO2 by ion-beam stimulation

Tsunoda, I. / Nagata, T. / Kenjo, A. / Sadoh, T. / Miyao, M.

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Low-temperature solid-phase crystallization of a-Si1-xGex on SiO2 by ion-beam stimulation

Tsunoda, I. / Nagata, T. / Kenjo, A. / Sadoh, T. / Miyao, M.

Low-temperature solid-phase crystallization of a-Si1-xGex on SiO2 by ion-beam stimulation

Tsunoda, I. / Nagata, T. / Kenjo, A. / Sadoh, T. / Miyao, M.

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Document information

Title:

Low-temperature solid-phase crystallization of a-Si1-xGex on SiO2 by ion-beam stimulation

Contributors:

Tsunoda, I. (author) / Nagata, T. (author) / Kenjo, A. (author) / Sadoh, T. (author) / Miyao, M. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 89 ; 336 - 340

Publication date:

2002-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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