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    Infrared study of carbon incorporation during chemical vapor deposition of SiC using methylsilanes

    New search for: Shinohara, M.
    New search for: Kimura, Y.
    New search for: Shoji, D.
    New search for: Niwano, M.

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    Infrared study of carbon incorporation during chemical vapor deposition of SiC using methylsilanes

    New search for: Shinohara, M.
    New search for: Kimura, Y.
    New search for: Shoji, D.
    New search for: Niwano, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Infrared study of carbon incorporation during chemical vapor deposition of SiC using methylsilanes

    New search for: Shinohara, M.
    New search for: Kimura, Y.
    New search for: Shoji, D.
    New search for: Niwano, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Infrared study of carbon incorporation during chemical vapor deposition of SiC using methylsilanes

    Contributors:

    Shinohara, M. (author) / Kimura, Y. (author) / Shoji, D. (author) / Niwano, M. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 175-176 ; 591-596

    Publication date:

    2001-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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