Surface morphology and structural observation of laser interference crystallized a-Si:H/a-SiNx:H multilayers: Fid-Bau Portal

Surface morphology and structural observation of laser interference crystallized a-Si:H/a-SiNx:H multilayers

Wang, L. / Li, J. / Huang, X. / Li, Q. / Yin, X. / Fan, W. / Xu, J. / Li, W. / Li, Z. / Zhu, J.

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Surface morphology and structural observation of laser interference crystallized a-Si:H/a-SiNx:H multilayers

Wang, L. / Li, J. / Huang, X. / Li, Q. / Yin, X. / Fan, W. / Xu, J. / Li, W. / Li, Z. / Zhu, J.

Surface morphology and structural observation of laser interference crystallized a-Si:H/a-SiNx:H multilayers

Wang, L. / Li, J. / Huang, X. / Li, Q. / Yin, X. / Fan, W. / Xu, J. / Li, W. / Li, Z. / Zhu, J.

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Title:

Surface morphology and structural observation of laser interference crystallized a-Si:H/a-SiNx:H multilayers

Contributors:

Wang, L. (author) / Li, J. (author) / Huang, X. (author) / Li, Q. (author) / Yin, X. (author) / Fan, W. (author) / Xu, J. (author) / Li, W. (author) / Li, Z. (author) / Zhu, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 165 ; 85-90

Publication date:

2000-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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