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Structural and optical properties of high density Si-ncs synthesized in SiNx:H by remote PECVD and annealing
Structural and optical properties of high density Si-ncs synthesized in SiNx:H by remote PECVD and annealing
Structural and optical properties of high density Si-ncs synthesized in SiNx:H by remote PECVD and annealing
Carrada, M. (author) / Zerga, A. (author) / Amann, M. (author) / Grob, J. J. (author) / Stoquert, J. P. (author) / Slaoui, A. (author) / Bonafos, C. (author) / Schamm, S. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 147 ; 218-221
2008-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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